Journal
ADVANCED MATERIALS
Volume 17, Issue 8, Pages 1039-+Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200401264
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Ultrananocrystalline diamond (UNCD) may offer a solution to tribological failure of silicon-based micromachines because of its outstanding mechanical properties. The first measurements of manometer-scale adhesion and friction on the tribologically relevant underside of UNCD films (see Figure) are reported, revealing that the UNCD films are far less adhesive than silicon and confirming their potential for use in micro- and nanomachines.
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