Journal
OPTICAL MATERIALS
Volume 27, Issue 8, Pages 1421-1425Publisher
ELSEVIER
DOI: 10.1016/j.optmat.2004.07.016
Keywords
nano-structuring; lithium niobate; focused ion beam; reactive ion etching
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We report on two novel ways for patterning lithium niobate (LN) at submicronic scale by means of focused ion beam (FIB) bombardment. The first method consists of direct FIB milling on LiNbO3 and the second one is a combination of FIB milling on a deposited metallic layer and subsequent RIE (Reactive Ion Etching) etching. FIB images show in both cases homogeneous structures with well reproduced periodicity. These methods open the way to the fabrication of photonic crystals on LiNbO3 substrates. (c) 2004 Elsevier B.V. All rights reserved.
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