Comparative study of spin coated and sputtered PMMA as an etch mask material for silicon micromachining

SiO2 and Si3N4, are usually used to mask the selected portions during etching of silicon in anisotropic etchants like KOH but polymers are expected to be very good alternative to SiO2 and Si3N4 as masking materials for MEMS applications. An adherent spin coated PMMA layer is reported to work as a mask material. It is a low temperature process, cheaper and films can be easily deposited and removed. One of the problems in its use is its adhesion to the substrate. Our previous experience in the field made us feel that sputtered PMMA will act as better mask because of its better adhesion to silicon. In the present article, a comparative study of spin coated PMMA with sputtered PMMA as an etch mask for silicon micromachining is reported. Structural and adhesive characteristics of the films are determined and compared with those available in the literature. These films deposited on silicon wafer were exposed to anisotropic etchant, KOH, to estimate the masking behavior. The maximum masking time of 32 min in 20 wt.% KOH at 80 degrees C was obtained for spin coated PMMA samples, which were prebaked at 90 degrees C. Masking time of sputter deposited PMMA films was found to be 300 min under similar conditions such as 20 wt.% KOH at 80 degrees C. This masking time is sufficient for fabrication of various MEMS structures, thus indicating candidature of sputtered PMMA as masking material. Various properties of the films are discussed and compared with the ones obtained through literature. (c) 2005 Elsevier B.V. All rights reserved.