4.6 Article

Two-photon lithography of nanorods in SU-8 photoresist

Journal

NANOTECHNOLOGY
Volume 16, Issue 6, Pages 846-849

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/16/6/039

Keywords

-

Ask authors/readers for more resources

Studies on two-photon lithography in negative SU-8 photoresist demonstrate the possibility of obtaining mechanically stable, stress-free, extended nanorods having lateral sizes of about 30 nm (corresponding to lambda/25 resolution). The high resolution achievable with the given combination of materials and fabrication techniques demonstrates its potential for the fabrication of large-scale nanostructures, such as photonic crystals with photonic stop gaps at visible wavelengths.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.6
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available