Journal
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
Volume 144, Issue -, Pages 987-992Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.elspec.2005.01.248
Keywords
VUV; optical constants; optical coatings; SiC
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Optical constants of SiC thin films deposited with RF magnetron sputtering have been derived in the VUV. The films have been deposited with different parameters resulting in various C/Si ratios. Reflectance measurements have been made with a dedicated facility in the range 300-1300 angstrom. Index of refraction and absorption coefficient have been derived by fitting the reflectance data with the calculated ones. (c) 2005 Elsevier B.V. All rights reserved.
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