4.5 Article

Design and optimization of a MEMS electret-based capacitive energy scavenger

Journal

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 14, Issue 3, Pages 429-435

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2005.844803

Keywords

capacity converters; electret; energy harvesting; microelectromechanical systems (MEMS)

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In this paper, a method for the design and optimization of an electret-based vibration-to-electric microconverter is presented, using a nonlinear dynamical model of the device. The dynamics of the converter is analyzed in detail, showing the importance of properly accounting for the nonlinearity in the optimization process. A procedure to determine a set of optimization parameters is finally presented.

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