Journal
NANOTECHNOLOGY
Volume 16, Issue 6, Pages 655-663Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/16/6/006
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Helical nanobelts of SiGe/Si and SiGe/Si/Cr are fabricated by rolling up strained thin heterostructures. The fabrication involved electron beam lithography, reactive ion etching, and wet chemical etching steps followed by a drying procedure. All parameters of the helical nanobelts, namely their helical angle, chirality, pitch and diameter, are controllable in a reproducible fashion. The ease of fabrication of SiGe/Si and hybrid helical nanobelts opens new paths for the fabrication technology of micro- or nanoscale sensors, transducers, resonators and cylindrical shaped micro-capacitors.
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