Quantum efficiency of back-illuminated CCD detectors in the VUV region (30-200 nm)

Charge-coupled devices (CCD's) are the detectors of choice for spectroscopy of highly charged ions due to their good linearity, spatial resolution, and high quantum efficiency (QE) over a wide wavelength range going from the gamma-rays to the far infrared. However, the efficiency in the UV region of back-illuminated CCDs is not well known because of the lack of commercially available calibrated light sources in that wavelength range. By using the beam-foil light source, which produces well controlled line rich spectrum all over the XUV and VUV spectra, we have been able to measure the QE of our CCD over a large wavelength range. Our results are in accordance with the data gathered from the literature and allow us to propose a universal curve for the QE efficiency of CCDs in the 30-200 nm region, (c) 2005 Elsevier B.V. All rights reserved.