Journal
MICROELECTRONICS JOURNAL
Volume 36, Issue 7, Pages 683-686Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mejo.2005.04.041
Keywords
micromachming; submillimeter waves; submillinieter waveguide components; waveguide coupler; bolometers; infrared; heterodyne receivers
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In this paper, we describe our progress in micromachining of submillimeter waveguide structures such as a quadrature waveguide coupler which is a part of a THz balanced heterodyne receiver. We have set up and developed pilot testing of the micromachining process with required high quality of structure. (c) 2005 Elsevier Ltd. All rights reserved.
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