Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 20, Issue 7, Pages S254-S257Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0268-1242/20/7/016
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In this paper, we present the latest chemical mapping images of heterogeneous mixtures based on far-infrared reflection spectra obtained using a terahertz pulsed imaging system. The terahertz images and spectral data obtained have a spectral resolution of 1 cm(-1) and cover a spectral range of 5-80 cm(-1). This broad spectral coverage enables us to map out the spatial distribution of individual chemical components of a sample in a single measurement.
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