Journal
OPTICS LETTERS
Volume 30, Issue 14, Pages 1867-1869Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.30.001867
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We fabricate microchannels in fused silica by femtosecond laser irradiation followed by etching in diluted hydrofluoric acid. We show a dramatic dependence of the etch rate on the laser polarization, spanning 2 orders of magnitude. We establish the existence of an energy-per-pulse threshold at which etching of the laser-modified zones becomes highly polarization selective. The enhanced selective etching is due to long-range, periodic, polarization-dependent nanostructures formed in the laser-modified material. (c) 2005 Optical Society of America.
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