Free-standing epitaxial La1-x(Sr,Ca)xMnO3 membrane on Si for uncooled infrared microbolometer -: art. no. 033502

Ar ion beam etching and inductively coupled SF6 and C4F8 plasma-etching processes have been employed to fabricate free standing membrane from the heteroepitaxial La1-x(Sr,Ca)(x)MnO3(50 nm)/Bi4Ti3O12(100 nm)/CeO2(40 nm)/YSZ(30 nm) film structure pulsed laser deposited on Si(001) wafer. We demonstrate feasibility to use epitaxial colossal magnetoresistive manganite film as thermally isolated self-supporting membrane for uncooled infrared microbolometer applications. (c) 2005 American Institute of Physics.