Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 108, Issue 1-2, Pages 455-460Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2004.12.077
Keywords
thermoelectric hydrogen sensor; micro-hotplate; SiGe; ceramic catalyst
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The thick film ceramic catalyst was deposited by dispenser method onto a micro-hotplate of novel thermoelectric hydrogen sensor (THS). The voltage signal of this micro-THS for hydrogen is proportional to the temperature gradient developed on the sensor device by the catalytic combustion of hydrogen. The promising performance of ceramic thick film catalyst of Pt and alumina of the micro-THS has resulted in the successful demonstration of large voltage signal, room temperature operation, and wide-range hydrogen detection. The voltage signal of micro-THS with the ceramic thick film catalyst for 1% hydrogen was 7 and 9.4 mV, at room temperature and 100 degrees C, respectively. The detection range of the sensor for hydrogen in air was found to be about 25 ppm to 3%, even at room temperature operation. (c) 2005 Elsevier B.V. All rights reserved.
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