Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 20, Issue 9, Pages 966-971Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0268-1242/20/9/014
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We report the experimental result of the specific contact resistance (rho(c)) of porous silicon and silver metal Ohmic contact structure formed on the n(+) region (doped with phosphorous atoms) to boron-doped p-type single crystalline silicon. The contact structure consists of sintered Ag metal grid contact on a porous silicon surface, which was formed oil the n(+) region by an electrochemical etching process. The electrical properties of the Ohmic contact thus formed are estimated by measuring the specific contact resistance at the interface of the porous silicon/silver Ohmic contact structure as a function of surface doping concentration. The measured value of rho(c) as a function of the surface doping shows that p, is a strong function of surface doping, and decreases with increasing doping. The measured data provide reliable values of pc for the silver metal/porous silicon/p-type c-Si structure, which enable us to study the electrical properties of the porous silicon/silver Ohmic contact.
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