Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 123-24, Issue -, Pages 240-248Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.03.049
Keywords
FEM; polyimide; capacitive sensors; pressure sensors; fluid dynamics
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This paper presents a capacitive pressure sensor strip implemented in general purpose printed circuit board (PCB) technology based on a thin 3D structure composed of polyimide, woven glass reinforced epoxy resin (FR4) and metal layers. Multiphysics finite elements method (FEM) simulations have been performed over the proposed structure in order to develop a time-dependent electrical and mechanical model that can be easily used to tailor the characteristics to the application. The device targets a wide class of fluid dynamics applications, being non-invasive, comformable and smart for placement. The device simulations are herein validated by experimental wind tunnel measurements and compared with figures obtained on a wing profile by conventional electromechanical pressure transducers. This approach is one of the first example of fully embedding and electronically controlled fluid flow monitoring apparatus that could be used in replacement of state of the art mechanical systems. (C) 2005 Elsevier B.V. All rights reserved.
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