Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 123-24, Issue -, Pages 50-53Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.02.032
Keywords
accelerometer; SOI; direction independent; inertial sensor; three-axis; bulk micromachining
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This paper describes design and fabrication of a capacitive three-axis accelerometer. The devices are bulk micromachined from SOI-wafers by DRIE, and are protected by glass encapsulation. The design is optimised to give direction independent resolution and frequency response, i.e. identical properties in all directions. (C) 2005 Elsevier B.V All rights reserved.
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