Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 123-24, Issue -, Pages 505-514Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.03.035
Keywords
rf MEMS; telecommunication; symmetric toggle switch; surface micromachining
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In this paper, we present a new type of rf MEMS switch with low actuation voltage and high isolation, for high rf power and reliability applications in telecommunication. 'Symmetric toggle switch' (STS) is based on push-pull mechanism and utilizes torsion springs and levers, placed symmetrically and transverse to CPW line. The switches designed for 8-14 GHz applications have analytically calculated and FEM simulated actuation voltages in the range of 8-10 V. The simulated insertion loss and isolation for the devices are 0.25 and 35 dB, respectively, at 10 GHz. The fabrication process and preliminary experimental results are also presented. (C) 2005 Elsevier B.V. All rights reserved.
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