Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 123-24, Issue -, Pages 18-22Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.03.044
Keywords
molded interconnect device; inclinometer; composite
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We report on an innovative low cost concept for the fabrication of micromechanical capacitive inclination sensors. The concept based on moulded interconnect device (MID)-technology where three dimensional polymer devices are fabricated by injection moulding and covered by a structured metal layer using electroless plating and laserablation. To demonstrate the principle of operation we fabricated and characterized first demonstrator devices using standard PCBs with different electrode designs for different measurement ranges. (C) 2005 Elsevier B.V. All rights reserved.
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