Journal
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
Volume 60, Issue 9-10, Pages 1334-1341Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.sab.2005.07.006
Keywords
3D micro-XRF; confocal XRF; quantitative micro-XRF
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The newest development in Micro X-Ray Fluorescence Analysis (micro-XR-F) is the expansion of its capabilities to depth resolution using a confocal setup with X-ray optics. While the usefulness of this 3D micro-XRF method has already been shown for a number of applications, reliable quantification procedures still have to be developed. In this paper, we present expressions for the primary fluorescence intensity of various types of 3D micro-XRF experiments based on the fundamental parameter approach. A major constituent of these equations is the description of the confocal volume defined by the X-ray optics used. The model provides analytical expressions for the sensitivity of the 3D micro-XRF spectrometer, which is the characteristic quantity. It opens up the way for an experimental characterization of the spectrometer and for a general quantification of 3D micro-XRF measurements. First experimental evidence is presented for the validity of relations derived. Furthermore, distinct features of 3D micro-XRF measurements in comparison to ordinary XRF measurements are discussed. (c) 2005 Elsevier B.V. All rights reserved.
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