4.4 Article Proceedings Paper

Preparation and characterization of Mn-Ir/Fe-Si exchange-coupled multilayer film with ru underlayer for high-frequency applications

Journal

IEEE TRANSACTIONS ON MAGNETICS
Volume 41, Issue 10, Pages 3511-3513

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMAG.2005.854745

Keywords

exchange coupling; Fe-Si; high-frequency micromagnetic device; Mn-Ir; Ru underlayer; small anisotropy dispersion

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Fe-Si magnetic film and Mn-Ir/Fe-Si exchange-coupled film with an Ru underlayer were fabricated and evaluated. Both coercivity and anisotropy dispersion were reduced due to the Ru underlayer effect on the magnetic properties of Fe-Si magnetic film and Mn-Ir/Fe-Si exchange-coupled film. Even in the Mn-Ir/Fe-Si exchange-coupled multilayer film with an Ru underlayer, the coercivity of the upper Fe-Si layer was reduced.

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