Direct imprinting using soft mold and gas pressure for large area and curved surfaces

In this paper we report a simple and effective method that renders direct imprinting of sub-micron structures onto PMMA resist coated on large area and curved substrates using the PDMS mold on a closed chamber. Nitrogen gas was employed to generate a uniform pressure. The patterns of the soft mold could be replicated with high quality over an entire 12, in. resist-coated area. The process was further successfully applied to the imprinting of a curved substrate. (c) 2005 American Vacuum Society.