4.2 Article Proceedings Paper

Cross sections for electron interactions in condensed matter

Journal

SURFACE AND INTERFACE ANALYSIS
Volume 37, Issue 11, Pages 824-832

Publisher

WILEY
DOI: 10.1002/sia.2101

Keywords

electron transport; elastic scattering; cross sections; Monte Carlo algorithms

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The fundamental components of Monte Carlo algorithms for the simulation of electron transport in matter are the differential and total cross sections for the relevant interaction mechanisms. We present different theoretical models And approximations to compute these cross sections for elastic scattering, inelastic collisions and bremsstrahlung emission of electrons with kinetic energies larger than about 100 eV. We limit our considerations to. those models that are broadly applicable and suited for efficient random sampling. The approximations underlying the various models and their range of applicability are discussed. Copyright (C) 2005 John Wiley & Sons, Ltd.

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