Journal
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume 52, Issue 11, Pages 2047-2053Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2005.1561674
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A new type of piezoelectric plate actuator for ultrasonic linear motors has been developed. These new piezoelectric actuators use the principle of asymmetric resonant excitation of the piezoceramic plate in a special resonant mode consisting of a standing two-dimensional extensional wave in a piezoceramic plate. The behavior of the actuator has been simulated with finite-element method (FEM) software and the simulation results checked with single-point contact measurements on the surface of the actuator. This paper describes this work and closes by describing the new ultrasonic translation stages based on this design.
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