Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 111, Issue -, Pages 22-27Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2005.07.049
Keywords
microfabrication; nanostructured materials
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Supersonic cluster beam deposition (SCBD) is used for fabrication of microsensors based on nanostructured titania layers. With a simple one-step post-deposition thermal treatment it is possible to modify the structural and electrical properties of the sensitive layers. Morphological, structural, and electrical characterisations are shown. The obtained sensors have very good performances in term of dynamic response to the exposure to methanol. (c) 2005 Elsevier B.V. All rights reserved.
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