Journal
THIN SOLID FILMS
Volume 492, Issue 1-2, Pages 313-321Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2005.07.049
Keywords
biosensors; indium thin oxide; sputtering; electrical properties and measurement
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Our recent studies have shown that thin films of indium tin oxide (ITO) could be deposited onto non-conductive optical fiber tips, which were then used as working electrodes for the electrochemical deposition of polymers with reactive groups (biotin), so as to create a biosensor. Physico-chemical properties of ITO thin films (260 nm) deposited by radio frequency (r.f.) sputtering onto fiber optics have been studied and compared to the existing literature on a flat glass surface. The film properties vary particularly for different oxygen pressures used during deposition. The microstructure of these thin films is determined using X-ray diffraction, transmission electron microscopy, scanning electron microscopy and atomic force microscopy. (c) 2005 Elsevier B.V. All rights reserved.
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