Journal
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 52, Issue 6, Pages 1644-1652Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIE.2005.858708
Keywords
planar motor; position control; switched reluctance
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This paper presents the position control of a novel two-dimensional (2-D) switched reluctance (SR) planar motor. The planar motor consists of a six-coil moving platform and a flat stator base made from laminated mild steel blocks. Unlike conventional x-y tables, which stack two moving slides on top of each other, the proposed 2-D planar motor has the advantages of simple mechanical construction, high reliability, and the ability to withstand harsh operating conditions. Together with the two linear encoders attached to the x-axis and y-axis, the motor can be controlled under closed-loop mode. To combat the problem of force nonlinearity, this paper proposes a cascade controller with force linearization technique to implement the drive controller. Due to the unique structure of the planar motor's magnetic circuit, there is very little coupling between the x-axis and y-axis, and no decoupling compensation is needed. Preliminary results show that the proposed SR planar motor has a positional accuracy of 5 mu m and a maximum acceleration/deceleration rate of 2 G.
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