Journal
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS
Volume 47, Issue 6, Pages 546-548Publisher
JOHN WILEY & SONS INC
DOI: 10.1002/mop.21226
Keywords
antenna-coupled detectors; microbolometers; silicon nitride membrane; responsivity; thermal impedance
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Square-spiral antenna-coupled microbolometers made of gold and chrome are fabricated on a silicon-nitride membrane. The membrane gives mechanical stability and thermal isolation to the detectors so that they can be used as picture elements in commercial infrared-imaging systems. The fabricated devices are measured under room pressure and tinder vacuum, giving D* values of 3 X 10(6) cm root Hz/W and 1.7 X 10(7) cm root Hz/W, respectively. By using vanadium-oxide, values well above 1 X 10(8) cm root Hz/W for D* can be obtained. Variations to the fabrication process that will allow the use of vanadium oxide are suggested. (c) 2005 Wiley Periodicals, Inc.
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