Journal
APPLIED PHYSICS LETTERS
Volume 88, Issue 3, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2161939
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We demonstrate the synthesis of nanoporous Pt thin films on Si by electrochemical dealloying. Amorphous PtxSi1-x films (similar to 100-250 nm thick) are formed by electron beam codeposition and dealloyed in aqueous HF solutions at an electrochemical potential sufficient to selectively remove Si while allowing self-assembly of Pt into a nanoporous structure. The Pt nanoporous layers have a pore size of 5-20 nm, ligament thickness similar to 5 nm, a surface area enhancements > 20 times, and an ultrafine grain polycrystalline microstructure. (c) 2006 American Institute of Physics.
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