Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 243, Issue 2, Pages 392-396Publisher
ELSEVIER
DOI: 10.1016/j.nimb.2005.09.002
Keywords
beam charge normalization; Rutherford backscattering spectroscopy (RBS); elastic recoil detection analysis (ERDA); ion implantation
Ask authors/readers for more resources
Accurate and reproducible determination of the number of impact ions is essential for quantitative IBA measurements. Herewith we present an in-beam charge-collection device, consisting of a tungsten mesh enclosed by two negatively biased annular electrodes and a shaping slit. The charge-collection efficiency was measured as a function of aperture bias and the reproducibility of charge collection at different bias voltages studied. Scanning transmission ion microscopy (STIM) was used to check the effect of beam scattering at the mesh on its energy distribution. The effect of the device on the primary beam energy distribution was calculated for the beams typically used in Rutherford backscattering spectroscopy (RBS) and elastic recoil detection analysis (ERDA). Excellent characteristics of the device were demonstrated. (c) 2005 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available