Influence of in situ ultrasound treatment during ion implantation on formation of silver nanoparticles in silica

We report on the effect of in situ ultrasound treatment on the clustering process of silver atoms in ion-implanted SiO2. Cross-sectional transmission electron microscopy shows single-crystal Ag spheres with an increased cluster size when prepared using ultrasound vibrations. Time-of-flight secondary-ion-mass spectrometry demonstrates an enhanced yield of [Ag-2](216) complexes in structures treated with acoustic waves. An analysis of the influence of ultrasound on defect reaction kinetics as well as on different stages of the clustering process is performed. (c) 2006 American Institute of Physics.