Journal
JOURNAL OF APPLIED PHYSICS
Volume 99, Issue 3, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2169867
Keywords
-
Categories
Ask authors/readers for more resources
A simple technique has been developed for fabricating tunable nanostructure arrays, combining ion polishing and nanosphere lithography. Nanohole arrays with the controllable shape and in-plane dimensions are demonstrated. The combination of ion polishing and nanosphere lithography yields tunable masks and provides an easy way for flexible nanofabrication. (c) 2006 American Institute of Physics.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available