Journal
MICROELECTRONIC ENGINEERING
Volume 83, Issue 3, Pages 393-398Publisher
ELSEVIER
DOI: 10.1016/j.mee.2005.10.010
Keywords
zinc oxide; electron beam evaporation; annealing treatment; structural properties; optical measurements; resonator
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High quality Zinc oxide thin films have been fabricated by reactive e-beam evaporation in an oxygen environment. The effect of air annealing on the optical and structural properties of the e-beam evaporated ZnO is investigated. Raman spectroscopy has been found to be an efficient tool to evaluate the residual stress in the as-grown ZnO films from the position of the E-2 (high) mode. Photoluminescence and transmittance measurements showed that the best optical and structural quality of the e-beam evaporated ZnO occurred at 300 degrees C. Finally, thin films of ZnO evaporated by e-beam technique have served to eliminate the compressive stress due to the sputtered piezoelectric ZnO and therefore to improve the quality of the fabricated resonators by stacking these ZnO layers fabricated by electron beam technique and rf magnetron sputtering, respectively. (c) 2005 Elsevier B.V. All rights reserved.
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