Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 16, Issue 3, Pages 526-530Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/16/3/007
Keywords
-
Ask authors/readers for more resources
The temperature distribution inside the microchannel was first measured using a micro-Raman spectroscopy system. Polymerase chain reaction (PCR) inside the microchannel, which is very sensitive to temperature change, was chosen to validate a novel thermometry. The micro PCR chip was fabricated by silicon micromachining. The microchip consisted of a microchannel inside the chip, a Pt film heater and a Pt film sensor on the silicon surface. The O-H stretch vibration mode of water was analyzed using a micro-Raman spectroscopy system. Its spectral changes were calibrated with temperature. The intensity ratio of the hydrogen-bonded (HB) to non-hydrogen-bonded (NHB) O-H stretch vibration modes has a linear relation with temperature. The temperature of the microchannel controlled at 55 degrees C varied from 53.6 to 54.8 degrees C depending on the location of the microchannel.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available