Journal
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS
Volume 26, Issue 2-3, Pages 348-353Publisher
ELSEVIER
DOI: 10.1016/j.msec.2005.10.079
Keywords
microcantilever sensor; resonant frequency; sensitive layer thickness
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A gas sensor based on the use of a resonating microcantilever has been realized by using a polymer sensitive coating. From the theoretical study of the microcantilever sensitivity, it has been deduced that the sensitivity is enhanced when the resonant frequency or the sensitive coating thickness are increased. The sensitive coating thickness influence has then been verified experimentally by using polyetherurethane (PEUT) as sensitive coating for ethanol detection. From these measurements, some drawbacks are shown: the coating thickness increase leads to a sensor response time increase and a frequency noise increase which worsens the limit of detection. Conclusions are then made about the sensitive coating optimization depending on application constraint considerations. (c) 2005 Elsevier B.V. All rights reserved.
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