Journal
ULTRAMICROSCOPY
Volume 106, Issue 4-5, Pages 269-276Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2005.09.001
Keywords
tomography; EELS; EFTEM; energy filter
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Energy filtered TEM, EFTEM, provides three-dimensional data, two spatial and one spectral dimension. We propose to acquire these data by measuring a series of images with a defocused energy filter. It will be shown that each image is a projection of the data on the detector and that reconstruction of the data out of a sufficient number of such projections using a tomographic reconstruction algorithm is possible. This technique uses only a fraction of the electron dose an energy filtered series (EFS) needs for the same spectral and spatial resolution and the same mean signal-to-noise ratio. (c) 2005 Elsevier B.V. All rights reserved.
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