4.5 Article

Mechanical dissipation in silicon flexures

Journal

PHYSICS LETTERS A
Volume 351, Issue 4-5, Pages 205-211

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ELSEVIER
DOI: 10.1016/j.physleta.2005.10.103

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The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92 mu m thick (110) single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to phi = 4.4 x 10(-7). (c) 2005 Elsevier B.V. All rights reserved.

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