Journal
MICROELECTRONIC ENGINEERING
Volume 83, Issue 4-9, Pages 1221-1224Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2005.12.022
Keywords
focused-ion-beam chemical-vapor-deposition; three-dimensional; nano-sheet; nano-rotor
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Various shapes of three-dimensional nano-rotor have been fabricated using nano-sheet made by 30 kV Ga+ focused-ion-beam chemical-vapor-deposition (FIB-CVD) in the current range from 5 to 200 pA with phenanthrene vapor as a precursor. A nano-rotor moving has been observed using electrostatic attractive force and nitrogen gas blowing. Furthermore, the operational stability of four wings rotor with a longer axis has been confirmed by nitrogen gas blowing. (c) 2006 Elsevier B.V. All rights reserved.
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