Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 77, Issue 4, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2190210
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A new and simple calibration method for atomic force microscopy (AFM) is developed. This nonscanning method is based on direct force balances on surfaces with known slopes. The lateral force calibration is performed during force-distance measurements for normal force calibration. This method requires a substrate with known slopes, the z motion of the piezocalibrated, and the normal spring constant known. This technique determines not only the lateral detector sensitivity (N/V) but also the detector offset (V/m) and off-centering angle (alpha) for asymmetric cantilever-tip geometries. Because it is nonscanning, the AFM cantilever can be calibrated without dulling the tip. (c) 2006 American Institute of Physics.
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