4.4 Article Proceedings Paper

Manufacture of micro-sensors and actuators for flow control

Journal

MICROELECTRONIC ENGINEERING
Volume 83, Issue 4-9, Pages 1205-1208

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2006.01.171

Keywords

MEMS; airflow control; electroactive polymers; EAPs; pressure sensors; micro-actuators

Funding

  1. Engineering and Physical Sciences Research Council [GR/S20994/01, EP/C535847/1] Funding Source: researchfish
  2. EPSRC [EP/C535847/1] Funding Source: UKRI

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The design, manufacture and testing of micro-sensors and -actuators for aerodynamic drag reduction by flow control is described. Key factors in the designs are discussed, for example, the type and shape of the actuator electrodes affect the critical parameters of frequency response and deflection amplitude. Some aspects of future work are also covered. (c) 2006 Elsevier B.V. All rights reserved.

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