Journal
MICROELECTRONIC ENGINEERING
Volume 83, Issue 4-9, Pages 1205-1208Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2006.01.171
Keywords
MEMS; airflow control; electroactive polymers; EAPs; pressure sensors; micro-actuators
Categories
Funding
- Engineering and Physical Sciences Research Council [GR/S20994/01, EP/C535847/1] Funding Source: researchfish
- EPSRC [EP/C535847/1] Funding Source: UKRI
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The design, manufacture and testing of micro-sensors and -actuators for aerodynamic drag reduction by flow control is described. Key factors in the designs are discussed, for example, the type and shape of the actuator electrodes affect the critical parameters of frequency response and deflection amplitude. Some aspects of future work are also covered. (c) 2006 Elsevier B.V. All rights reserved.
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