Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 35, Issue 4, Pages 587-591Publisher
SPRINGER
DOI: 10.1007/s11664-006-0104-2
Keywords
light emitting diode (LED); gallium nitride (GaN); metalorganic chemical vapor deposition (MOCVD); InGaN
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We investigated the electrical and structural qualities of Mg-doped p-type GaN layers grown under different growth conditions by metalorganic chemical vapor deposition (MOCVD). Lower 300 K free-hole concentrations and rough surfaces were observed by reducing the growth temperature from 1,040 degrees C to 930 degrees C. The hole concentration, mobility, and electrical resistivity were improved slightly for Mg-doped GaN layers grown at 930 degrees C with a lower growth rate, and also an improved surface morphology was observed. In(0.25)Gao(0.75)N/GaN multiple-quantum-well light emitting diodes (LEDs) with p-GaN layers grown under different conditions were also studied. It was found from photoluminescence studies that the optical and structural properties of the multiple quantum wells in the LED structure were improved by reducing the growth temperature of the p-layer due to a reduced detrimental thermal annealing effect of the active region during the GaN:Mg p-layer growth. No significant difference in the photoluminescence intensity depending on the growth time of the p-GaN layer was observed. However, it was also found that the electro-luminescence (EL) intensity was higher for LEDs having p-GaN layers with a lower growth rate. Further improvement of the p-GaN layer crystalline and structural quality may be required for the optimization of the EL properties of long-wavelength (similar to 540 nm) green LEDs.
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