4.4 Article Proceedings Paper

Single-molecule transistor fabrication by self-aligned lithography and in situ molecular assembly

Journal

MICROELECTRONIC ENGINEERING
Volume 83, Issue 4-9, Pages 1706-1709

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2006.01.165

Keywords

nanolithography; molecular electronics; molecular self-assembly

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We describe the fabrication of single-molecule transistors by self-aligned lithography and in situ molecular assembly. Ultrathin metallic electrodes are patterned with a nanoscale interelectrode separation defined by the lateral oxidation of a thin layer of Al. Highly conjugated molecular units are sequentially assembled within the electrode gap by selective design of the molecular end group chemistry. The assembled devices display evidence of molecular conduction. (c) 2006 Elsevier B.V. All rights reserved.

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