Journal
DIAMOND AND RELATED MATERIALS
Volume 15, Issue 4-8, Pages 921-927Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2005.10.049
Keywords
diamond-like carbon; gas permeation; structure; optical gap
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The addition of a gas-impermeable coating on the inside wall of a standard polyethylene tereplithalate (PET) bottle has long been considered as a way to improve the packaging for beer, juice and carbonated soft drinks. We have developed a plasma-assisted deposition process suitable for the deposition of 100 nm thick, transparent, hydrogenated amorphous carbon (a-C:H) films on PET surfaces. The Sidel plasma technology uses an acetylene gas precursor and a microwave plasma, which allows us to obtain a high deposition rate of 60 nm/s necessary for industrial process flows. The a-C:H films provide a 50-fold reduction of the permeation rates Of O-2 . The composition, optical, structural and defect properties of the a-C:H films were characterized by Rutherford Back Scattering (RBS), Elastic Recoil Detection Analysis (ERDA), X-ray Photoelectron Spectroscopy (XPS), optical spectroscopy, Raman and Electron Paramagnetic Resonance (EPR). (c) 2005 Elsevier B.V. All rights reserved.
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