Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 203, Issue 5, Pages 868-873Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.200521461
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The growth of high-performance Mg-doped p-type AlxGa1-xN (x = 0.35) layers using low-pressure metal-organic chemical vapour deposition on an AlN/sapphire template is reported. The influence of growth conditions on the p-type conductivity of the AlxGa1-xN (x = 0.35) alloy was investigated. It was found that the p-type resistivity of the AlGaN alloy demonstrates a marked dependence on the Mg concentration, V/III ratio and group III element flow rate. A minimum p-type resistivity of 3.5 Omega cm for Al1-xGa1-xN (x = 0.35) epilayers was achieved. A Ni/Au (10 nm/100 nm) ohmic contact was also fabricated and a specific contact resistivity of 8.1 X 10(-2) Omega cm(2) was measured. (c) 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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