Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 39, Issue 7, Pages 1422-1426Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0022-3727/39/7/013
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A synchrotron microbeam high-angular resolution diffraction setup based on a phase zone plate and a perfect Si(004) analyzer crystal was introduced to Generate an x-ray microbeam with a lateral size of 0.24 mu m and an angular resolution of 2 arcsec. The microbeam high angular resolution x-ray diffraction was applied to study InGaAlAs-based multiple quantum well (MQW) ridge-waveguide arrays produced by metal-organic vapour-phase epitaxy in a selective area growth regime with a central waveguide width varying from 1.6 to 60 mu m. The analysis of the period T and the strain S in MQW ridge structures determined from the high-resolution diffraction data is presented. It was found that the MQW period is uniform across the ridge within the error bar of Delta T = +/- 0.25 nm. Within the waveguide array, the MQW period and strain can be adequately described by a gas-phase diffusion model.
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