Journal
APPLIED PHYSICS LETTERS
Volume 88, Issue 15, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2194823
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F- negative ions were detected by direct observation of the weak photodetachment absorption continuum below 364.5 nm by cavity ring-down spectroscopy. The negative ions were generated in a modified industrial dielectric plasma etch reactor, with 2+27 MHz dual frequency capacitive excitation in Ar/CF4/O-2 and Ar/C4F8/O-2 gas mixtures. The F- signal was superimposed on an unidentified absorption continuum, which was diminished by O-2 addition. The F- densities were in the range of (0.5-3)x10(11) cm(-3), and were not significantly different for single (27 MHz) or dual (2+27 MHz) frequency excitation, not confirming recent modeling predictions.
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