Journal
APPLIED PHYSICS LETTERS
Volume 88, Issue 20, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2204844
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We describe a combinatorial approach for analyzing reflectance-difference/reflectance-anisotropy (RD/RA) spectra that avoids the need to establish null orientations experimentally, suppresses experimental artifacts, signal averages, and allows RD/RA spectra to be assessed systematically for secondary contributions at principal angles different from that of the dominant contribution. Application to rapid-thermal-annealed oxidized and nitrided vicinal (111) Si-dielectric interfaces demonstrates the effectiveness of the procedure. (c) 2006 American Institute of Physics.
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