Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 129, Issue 1-2, Pages 212-215Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.11.061
Keywords
integrated micro-Hall probe; scanning magnetic microscopy; CMOS technology
Ask authors/readers for more resources
A new microsystern with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employed CMOS technology has an active area of only 2.4 mu m x 2.4 mu m. The microsystem exhibits an output sensitivity of 7.5 V/T in perpendicular direction to the chip surface and a magnetic field resolution of 300 nT/root Hz at 1 Hz. A two-dimensional magnetic scanner was developed to demonstrate the performances of the developed microsystem. (c) 2005 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available