Journal
MRS BULLETIN
Volume 31, Issue 6, Pages 461-465Publisher
CAMBRIDGE UNIV PRESS
DOI: 10.1557/mrs2006.119
Keywords
crystalline; microelectronics; polycrystal; Si
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Low-defect-density polycrystalline Si on flexible substrates can be instrumental in realizing the full potential of macroelectronics. Direct deposition or solid-phase crystallization techniques are often incompatible with polymers and produce materials with high defect densities. Excimer-laser annealing is capable of producing films of reasonable quality directly on polymer and metallic substrates. Sequential lateral solidification (SILS) is an advanced pulsed-laser-crystallization technique capable of producing Si films on polymers with lower defect density than can be obtained via excimer-laser annealing. Circuits built directly on polymers using these SILS films show the highest performance reported to date.
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