Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Volume 45, Issue 6B, Pages 5556-5559Publisher
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.45.5556
Keywords
EB-CVD; FIB-CVD; amorphous carbon nanopillar; Young's modulus; deflection measurement; accelerating voltage
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We investigated Young's modulus of amorphous carbon (a-C) pillars that exhibited different properties depending on which of two fabrication methods were used, electron-beam-induced chemical vapor deposition (EB-CVD) or focused ion-beam-induced CVD (FIB-CVD). The Young's modulus of the FIB-CVD pillars was almost linearly proportional to the accelerating voltage, while that of the EB-CVD pillars showed a completely opposite results. Secondary electrons. seemed to play an important role in the increase of Young's modulus of the pillars grown using EB-CVD.
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