Deburring and surface conditioning of micro milled structures by micro peening and ultrasonic wet peening

Deburring and smooth finishing processes for milled workpieces are well known in macro mould and die manufacturing. These processes are not directly transferable to micro parts and must be modified for this purpose. Therefore, deburring and surface conditioning by micro peening and ultrasonic wet peening of structures made by micro milling of quenched and tempered tool steel are investigated. The results are presented in this paper.